Abstract
Photoluminescent boron-doped (100)-oriented porous silicon fabricated on a p-type silicon substrate by electrochemical etching in a solution containing fluorosilicic acid and ethanol is studied. The morphological, structural, and optical properties of silicon nanostructures obtained in solutions containing H2(SiF6) and ethanol are analyzed in comparison with the corresponding characteristics of samples formed in solutions of HF and ethanol. The morphological, structural, and optical properties were studied using scanning probe microscopy and spectrophotometry. It is shown that the porous silicon samples formed in solutions containing H2(SiF6) and ethanol have better optical properties, in particular, they exhibit more intense photoluminescence than the samples obtained in HF–ethanol solutions.
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