Monte Carlo simulation study of scanning Auger electron images

Abstract

Simulation of contrast formation in Auger electron imaging of surfaces is helpful for analyzing scanning Auger microscopy/microanalysis (SAM) images. In this work, we have extended our previous Monte Carlo model and the simulation method for calculation of scanning electron microscopy (SEM) images to SAM images of complex structures. The essentials of the simulation method are as follows. (1) We use a constructive solid geometry modeling for a sample geometry, which is complex in elemental distribution, as well as in topographical configuration and a ray-tracing technique in the calculation procedure of electron flight steps that across the different element zones. The combination of the basic objects filled with elements, alloys, or compounds enables the simulation to a variety of sample geometries. (2) Sampled Auger signal electrons with a characteristic energy are generated in the simulation following an inner-shell ionization event, whose description is based on the Castani’s inner-shell ionization cross section. This paper discusses in detail the features of simulated SAM images and of line scans for structured samples, i.e., the objects embedded in a matrix, under various experimental conditions (object size, location depth, beam energy, and the incident angle). Several effects are predicted and explained, such as the contrast reversion for nanoparticles in sizes of 10–60 nm, the contrast enhancement for particles made of different elements and wholly embedded in a matrix, and the artifact contrast due to nearby objects containing different elements. The simulated SAM images are also compared with the simulated SEM images of secondary electrons and of backscattered electrons. The results indicate that the Monte Carlo simulation can play an important role in quantitative SAM mapping.