Abstract

Extending a recently developed semiclassical approach, we report the development of a formula which allows the satisfactory description and prediction of absolute electron impact ionization cross sections for K, L, and M inner-shell ionization in the energy range from threshold up to 109 eV for all elements. The present formulation also allows to derive and extend a previously noted scaling law for K-shell ionization. The present results are compared with previous theoretical and experimental determinations where available.

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