Abstract: Cross sections for ionization of inner-shell electrons by electron impact

Abstract

Auger electron spectroscopy (AES) has been used extensively for qualitative surface analyses in recent years. There have, however, been relatively few attempts at quantitative surface analyses on account of lack of knowledge of key parameters (such as electron attenuation lengths, inner‐shell ionization cross sections, and backscattering factors) as a function, where appropriate, of material, incident electron energy, Auger electron energy, and instrumental characteristics. A review of experimental electron attenuation length data in the energy range relevant to AES and to x‐ray photoelectron spectroscopy (XPS) was given in a previous paper1 together with a method to predict attenuation lengths in other materials. We give a summary here of an analysis2 of available data concerning cross sections for ionization of inner‐shell electrons by electron impact. Cross‐section data of this type is also required in correction procedures for quantitative analysis by electron probe microanalysis.3 necessity the analy...