Monte Carlo Simulation of Yield and Energy Distribution of Secondary Electrons Emitted from Metal Surfaces

Abstract

A Monte Carlo simulation of secondary electron emission from Be (atomic number Z=4), Mg (Z=12), Al (Z=13), Mo (Z=42) and W (Z=74) due to 100 eV–4 keV electron impacts is performed in order to understand the primary energy (E p) dependence of the yield and the energy distribution of secondary electrons. The E p-dependence of the secondary electron yield calculated for the metals is characterized in terms of the maximum yield and E p at which it occurs, which are in good ageement with Kollath's empirical formula for E p where the formula can be applied. At high E p (>1 keV), the calculated energy distribution of the secondary electrons, except for Mg which has a low surface potential barrier, approaches the E p-independent theoretical curve derived by Chung and Everhart. At low E p, however, the energy distribution largely depends on E p, in particular for high-Z metal.