Abstract
The Monte Carlo simulation method is used to analyze the behavior of electron and hole mobility in different nanoelectronic devices including double gate transistors and FinFETs. The impact of technological parameters on carrier mobility is broadly discussed, and its behavior physically explained. Our main goal is to show how mobility in multiple gate devices compares to that in single gate devices and to study different approaches to improve the performance of these devices. Simulations of ultrashort channel devices taking into account quantum effects are also shown.
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