Abstract
Abstract This paper presents a triaxial capacitive accelerometer with low nonlinearity and cross-axis sensitivity, fabricated using SOG processing. Three single-axis sensor devices are orthogonally integrated on a single die. The signal detection and feedback mechanisms for the lateral (x/y-axis) and vertical (z-axis) accelerometers are implemented in a fully differential configuration, significantly reducing device nonlinearity and external environmental interference. The dynamic characteristics of the mechanical structure of the triaxial accelerometer are derived from a combination of theoretical analysis, numerical simulation, and experimental testing. The signal control circuit utilizes a fourth-order electromechanical sigma-delta modulation (EM-ΣΔM) circuit to validate the sensing characteristics of the triaxial accelerometer. The results indicate that the sensitivities (nonlinearities) of the x-, y-, and z-axes are 590 mV/g (0.66%), 600 mV/g (0.71%), and 58 mV/g (1.19%), respectively, and the corresponding bias instabilities were measured at 0.33 mg, 0.32 mg, and 1.07 mg, respectively. The cross-axis sensitivity ranged from 0.64% to 2.3%, while the low-frequency noise floor varied between 0.30 mg/√Hz and 0.67 mg/√Hz. In light of these performance characteristics, we hope that this work will find extensive applications in the field of inertial navigation measurements.
Published Version
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