Abstract
A microplasma device fabricated on a silicon substrate with a floating electrode inside the microdischarge space was investigated to determine the dependences of discharge properties in neon gas on the gas pressure p and the characteristic dimension D. With a decrease in p towards the condition of the minimum ignition voltage, the spatial emission distribution in the negative phase of the applied bipolar pulsed voltage changed from a hollow pattern with a bright periphery to a concentrated bright pattern in the central area above the floating electrode, which was similar to that in the positive phase. This observation encourages us to make this device structure to provide a brighter light source at the microscales for various photonic applications.
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