Abstract
Micro-Electro-Mechanical Systems (MEMS), also known as micromechatronic devices, integrate on the same chip (substrate) both micromechanical structures and microelectronics components. Microcantilevers are miniaturized beams clamped at one end and with the other end suspended freely outwards. They can be used as resonant structures in nano/micro mass detectors, allowing a quantitative assessment of the (substance) mass attached to these devices. An accurate modal analysis makes possible to estimate the sensitivity of the cantilevers or their ability to detect minimum frequencies shifts induced by the substance absorption. In order to obtain a high sensitivity, the structures must present high resonant frequencies (usually bending or torsion), in close correlation with a small equivalent mass. This paper deals with the vibration testing, modeling and simulation of a silicon rectangular microcantilever, micromachined through MEMS technologies. The results of analytical calculations and numerical computation by finite element analysis (FEM) have been compared with those measured through Laser Doppler Vibrometry (LDV) method using MSA-500 system from Polytec.
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