Abstract
The liquid source misted chemical deposition (LSMCD) method was employed in the preparation of lead zirconate titanate, Pb(Zr0.52Ti0.48)O3 (PZT) thin films. The desired thickness of the films was adjusted by a number of successive deposition/heating cycles. Typically, a 500-nm-thick film was achieved by running four processing cycles. The PZT films showed good phase purity with a (111)-preferred crystallographic orientation. The capacitance voltage (C-V) and polarization electric field (P-E) hysteresis curves displayed normal ferroelectric behavior of LSMCD-derived films with asymmetric switching. The dielectric and ferroelectric properties were comparable with the properties of thin films prepared by other techniques.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
