Abstract
Superconducting films of YBa2Cu3O7−x were depositedin situ on LaAlO3 substrates using single-target 90° off-axis sputtering. The obtained films have tipicalT c values of 91K. Surface resistance measurements on as-grown films reach 1.1 mΩ at 77K and 10GHz; whilst on ion-etched patterned resonant linesR s (77K, 10GHz) it is about 10mΩ.
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