Abstract
Tribological properties of Si/Si contacts were measured on a microscale by using an atomic force/friction force microscope. Friction forces and pull-off forces between a Si tip and a polished surface of a Si(100) wafer were studied as a function of applied normal load and relative humidity of the surrounding air. The results show that pull-off forces and friction coefficients increased and were strongly influenced by capillary forces with increasing humidity. Tribological interactions during 20 passes of overlapping sliding contact at 50% relative humidity and very small loads of 70 nN were confined to the layer of adsorbates and chemical reactions, without measurable solid damage on the Si(100) wafer.
Published Version
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