Abstract
The friction and pull-ff forces were measured between an atomic force microscope (AFM) probe made of Si3N4 and submicron-size asperity arrays on a single crystal tungsten plate, a silicon wafer, and a platinum film. A focused ion beam was used to produce two-dimensional asperity arrays. The tip of the AFM probe had a flat, square surface measuring 0.7×0.7 μm2. The pull-off force was proportional to the curvature radius of asperity peak, but was not affected by microroughness on the Peak. The friction force was proportional to Pull-off force. These suggest that Laplace pressure of condensed water was predominant as the pull off force and the Pull-off (adhesion) force worked as an extemal normal load for the friction. The friction coefficients calculated by regarding the pull-off force as the external normal load were compared between the platinum and silicon patterns, which proved that the friction coefficient on silicon was about twice higher than platinum.
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