Abstract
Ternary Ti–B–N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4, BCl3, H2, N2, and Ar. By virtue of X-ray diffraction analysis, X-ray photoelectron spectroscopy, scanning electron microscope, and high-resolution transmission electron microscope, the influences of B content on the microstructure and properties of Ti–B–N coatings were investigated systematically. The results indicated that the microstructure and mechanical properties of Ti–B–N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase. With increasing B content and decreasing N content in the coatings, the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2/a-BN via FCC-TiN+HCP-TiB2/a-BN. The highest microhardness of about 34 GPa is achieved, which corresponds to the nanocomposite Ti–63%B–N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase. The lowest friction-coefficient was observed for the nanocomposite Ti–41%B–N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN phase.
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