Abstract
Wear-resistant titanium nitride (TiN) coatings could be obtained at a deposition temperature of 400 °C by r.f. glow discharge plasma-enhanced chemical vapour deposition (PECVD). TiN deposition was performed on tool steels and cemeted carbide cutting tools by the PECVD technique using a gaseous mixture of TiCl4, N2, H2 and argon in order to determine the effect of the reactant gas composition on the PECVD of TiN. The experimental results show a considerable difference in the deposition rates and the constituents of the deposits according to the inlet fractions of reactant gases as well as the substrate materials. However, the atomic ratio of the TiN deposited by PECVD is not affected by reactant gas composition unless the deposited layer incorporates iron. The deposited TiN layer contains chlorine, and its content can be reduced by increasing the H2 inlet fraction. At high N2 inlet fractions, the deposited layer contains iron and the atomic ratio of nitrogen to titanium is decreased. The surface of the deposited TiN is very uniform and the films are composed of extremely fine grains of TiN.
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