Microstructure and Electrical Conductivity of SrRuO<SUB>3</SUB> Thin Films Prepared by Laser Ablation

Abstract

SrRuO 3 (SRO) thin films were prepared by laser ablation, and the effects of deposition conditions on the microstructure and electrical conductivity of these films were investigated by changing the substrate temperature (T sub ) and deposition atmosphere. The SRO thin films deposited on quartz substrates in a high vacuum (P = 10 -6 Pa) and an oxygen partial pressure (P O2 ) of 0.13 Pa were amorphous, independent of T sub . Pseudo-cubic SRO thin films were obtained at P O2 = 13 Pa and T sub > 773 K. The Sr to Ru ratio increased with increasing T sub , and free Ru was contained in SRO films prepared at P = 10 -6 Pa. The crystal grain coarsened with increasing T sub and P O2 . The electrical conductivity (a) of SRO thin films increased with increasing T sus and P O2 , and the highest a was obtained at T sub = 973 K and P O2 = 13 Pa. The a of SRO films mainly changed with the Sr/Ru ratio and the surface morphology. The change of a associated with the magnetic phase transition was observed at 163 K.