Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation

Abstract

The fabrication process, application, and properties of a novel piezoresistive multiprobe with an integrated thermal tip deflection actuator are described in this article. The optimized fabrication process of the microprobe enables high-frequency sensor operation and integration of a high sharp conical tip, which was additionally covered with titanium using atomic layer deposition to improve mechanical endurance and ensure electrical conductivity. This microprobe was applied in high-resolution self-assembled monolayer surface investigations in which the piezoresistive cantilever with the integrated thermal deflection actuator was excited at two of its flexural-resonant eigenmodes. The excited second eigenmode and phase show different contrasts com-pared with images recorded at the first eigenmode.