Abstract
High vacuum packaging is the key manufacturing technology of passive vacuum devices. The inherent characteristics of narrow and long space and large surface-to-volume ratio make it challenging to effectively remove the desorption gas inside the device. To this end, the pressure distribution of two standard packaging methods during the pump-down process is investigated using the two-dimensional diffusion equation. Experiments and simulations show that a pressure gradient persists within the slit even when pumping reaches the quasi-equilibrium state. In addition, a Monte Carlo method based on the cosine law reveals that the high-frequency collisions of gas molecules with the walls impede the pumping process. Furthermore, the results indicate that for tube pumping, the number of collisions of gas molecules with the wall during transport within the gap is inversely proportional to the gap height. For edge pumping, the number of collisions is inversely proportional to the square of the gap height. This provides a theoretical basis for efficient high vacuum packaging and long-term pressure maintenance for passive vacuum devices.
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