Abstract
Constructed by a two-dimensional micro-electrostatic comb actuator fabricated by bulk micromachined process, a novel test device on chip was designed to study the phenomena of the microfrictions in the side wall between movable micro-electromechanical system elements. The general analytic expressions of the applied voltages, displacement, the static friction coefficient and the geometry parameters were established. It was found that the displacement was linear to Uy2, so the friction coefficient could be obtained by fitting them. And larger nb and l2 could help to decrease Uy and to increase the displacement.
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