Abstract
This article demonstrates the circular movement of microparticles in water using radial microelectromechanical system electrode arrays. The particles are moved in two polar dimensions, θ and r, by ac electro-osmosis. It is observed that initially particles circle rapidly above the array and move slowly radially to finally form a thin ring at an equilibrium radius. Three-dimensional computational fluid dynamics simulations are performed, cross sectional information is extracted to obtain tangential (Uθ) velocity as a function of r. Orbital velocity and equilibrium radius measurements are performed at various voltages. Velocities and radii are found to be in general agreement with the simulated results.
Published Version
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