Microcantilever geometry analysis for array sensor design

Abstract

In terms of fabrication and functioning, cantilevers are the simplest Micro Electro Mechanical Systems(MEMS) based devices. These cantilever based sensors have gradually progressed in all domain applications and may now found virtually everywhere. The usage of these MEMs based sensors is increasing gradually because of the distinct benefits that they provide. In high sensitivity applications like molecular sensing, microcantilever based sensors offer great promise for detecting a wide range of target atoms in gaseous and fluid medium as well chemical, and biological sensing applications. They too have an extensive range of applications in medicine, especially for early detection of more life-threatening diseases, identify intermolecular gene mutations, monitoring blood sugar levels, and detecting chemical and biological warfare agents. These cantilever based sensors offer numerous benefits over conventional diagnostic methods, including sensitivity, economical, easy to use, low analyte needed (in µl), non-hazardous procedures, and rapid response. In this study, we will explore the characteristics of two types of cantilever beams by modifying five types of materials, namely silicon, silicon dioxide and polysilicon, silicon nitride, and silicon carbide. Deflection properties are analysed by conducting a parametric sweep on arc length in order to build an array sensor. According to the simulation results the eigenfrequencies of the proposed array for the subjective load of 1Kda, 2Kda, 3Kda, 4Kda are 44×106,38×106,29×106,19×106respectively.