Micro pattern formation of ceramic thin film by synthesis from aqueous solution using resist pattern as a mold

Abstract

Fabrication of micro patterns of ceramic films was made by ceramic thin film synthesis reaction from aqueous solution using resist pattern as a mold. This method was applied to the formation of micro patterns of titanium dioxide and apatite. Minute patterns such as blocks, lines, geometrical figures and characters were well formed. The minimum line width of the micro pattern was 1 μm for titanium dioxide thin films and 2 μm for apatite thin films. This method is promising for fabricating micro patterns of ceramic thin films.