Abstract
Ultrasonic micromachining (USMM) has immense potential for micro-machining on quartz which is used in different field of applications such as optics, metrology and micro electro mechanical system (MEMS) etc. In this paper the influences of process parameters such as power rating, abrasive slurry concentration and tool feed rate on material removal rate (MRR), overcut and taper angle of the micro hole on quartz by USMM have been investigated. Stainless steel of grade 304 has been selected as the micro-tool material for ultrasonic micro drilling on quartz. The higher value of MRR of 0.4235 mm/min has been obtained at power rating of 400 W, abrasive slurry concentration of 40% and tool feed rate of 1.2 mm/min. The lower value of overcut of 55 µm and taper angle of 0.600 of micro hole have been obtained at abrasive slurry concentration of 20%, power rating of 300 W and tool feed rate of 1 mm/min.
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