Abstract
In this paper, the law of micro-friction in meso-scale is studied, one optical testing method of micro friction based on the structure of parallel cantilever is given and the testing system is designed, the composition of test system, testing method, the design of force sensor, the testing method and the calibration of force sensor are introduced. The force sensor is calibrated and the deformation of sensor is measured by light reflection. Then the micro friction is obtained by analyzing data. The results of experiment show the resolution of specification of micro friction testing is 10μN, which could meet the demands of micro friction testing with short stroke and high resolution and realize the precise test of micro friction, and the same time it has been analysed which load is unstable during testing.
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