Abstract
The work presents a novel micro-optical sensor for micro and nano-fluidic analysis. It is based on diffraction, occurred in total internal reflection conditions. The detector is integrated on an autonomous micro-fluidic device and produced by a unique combination of different techniques for micro- and nano-structuring and micromachining. The preliminary optical investigation shows sensitivity to the fluidic refractive index of 2 × 10 −3 and to the absorption coefficient of 6 × 10 6 m −1. Envisioned applications of the integrated micro-sensor are medical, biological and chemical diagnostic of liquid substances and dispersions of drugs, serums, proteins, peptides, DNA, RNA, etc.
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