Abstract
The absolute concentration of methyl radicals is measured in a hot filament chemical vapor deposition system for a range of filament temperatures and input gas compositions by using ultrasensitive optical absorption with a multi-element detector at wavelengths near 216 nm. The results yield effective activation energies for CH 3 production and indicate that CH 3 production is dominated by the gas-phase atomic hydrogen abstraction reaction when the input gas contains CH 4 and H 2. We find that passing ≈ 1% tert-butyl peroxide in H 2 over a hot filament is also an efficient CH 3 source, and has an activation energy similar to the activation energy for the production of CH 3 from CH 4.
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