Abstract
A honeycomb-like tin oxide (SnO2) film was grown on the silicon nanoporous pillar array (Si-NPA) substrate by a chemical vapor deposition (CVD) method. After SnO2 growth the pillar morphological characteristic of Si-NPA was inherited and the honeycomb-like SnO2 film surface was porous and crumpled, with the average nanopores sizes of ∼50 nm. A methanol sensor was made based on SnO2/Si-NPA and its methanol sensing properties were characterized. It was found that the optimum working temperature of the sensor was determined to be 320 °C. The device response increased from ∼3.6 to 38.9 monotonously with the methanol concentration changed from 10 to 500 ppm. The response and recovery times were measured to be ∼4–13 and ∼9–11 s, respectively. Furthermore, the sensor was proved to be excellent selective to methanol. Our results indicate that SnO2/Si-NPA might be a candidate material for fabricating practical methanol sensors.
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