Abstract

Adhesive or repulsive forces contributed by both meniscus and viscous forces can be significant and become one of the main reliability issues when the contacting surfaces are ultra smooth, and the normal load is small, as is common for micro/nano devices. In this study, both meniscus and viscous forces during separation for smooth and rough hydrophilic and hydrophobic surfaces are studied. The effects of separation distance, initial meniscus height, separation time, contact angle and roughness are presented. Meniscus force decreases with an increase of separation distance, whereas the viscous force has an opposite trend. Both forces decrease with an increase of initial meniscus height. An increase of separation time, initial meniscus height or a decrease of contact angle leads to an increase of critical meniscus area at which both forces are equivalent. An increase in contact angle leads to a decrease of attractive meniscus force but an increase of repulsive meniscus force (attractive or repulsive dependent on hydrophilic or hydrophobic surface, respectively). Contact angle has a limited effect on the viscous force. For asymmetric contact angles, the magnitude of the meniscus force and the critical meniscus area are in between the values for the two angles. An increase in the number of surface asperities (roughness) leads to an increase of meniscus force; however, its effect on viscous force is trivial. A slightly attractive force is observed for the hydrophobic surface during the end stage of separation though the magnitude is small. The study provides a fundamental understanding of the physics of the separation process and it can be useful for control of the forces in nanotechnology applications.

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