Abstract

Meniscus and viscous forces are sources of adhesive force when two surfaces are separated with a micro-meniscus present at the interface. The adhesive force can be one of the main reliability issues when the contacting surfaces are ultra-smooth and the normal load is small, as is common for micro/nano devices. In this paper, both meniscus and viscous forces of menisci with symmetric and asymmetric contact angles are modelled. Equations for both meniscus and viscous forces in division of menisci are analytically formulated. The role of these two forces is evaluated during the separation process. The effects of the contact angles, division of menisci, as well as liquid thicknesses, surface tension and viscosity of the liquid, and separation distance and time during separation are presented. It is found that contact angles significantly affect the break point and meniscus force, and the magnitude of meniscus force can be largely reduced by choosing proper asymmetric contact angles. ‘Force scaling’ effects are found to be true for both meniscus and viscous forces when one larger meniscus is divided into large numbers of identical micro-menisci. Meniscus force increases with the number of divisions whereas viscous force decreases by an order of inverse the number of division (1/N). Optimal configurations for low adhesion are identified. This study presents a comprehensive analysis of meniscus and viscous forces during separation of menisci under different physical configurations. It provides a fundamental understanding of the physics of the process and knowledge for control of adhesion due to liquid menisci.

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