Abstract
In this report the gas chromatography column was fabricated base on micro electro mechanical system (MEMS) technology. It tries to find an equilibrium point which can fast detect CWA stimulants with efficient column separation. Under deep reactive-ion etching (DRIE) process, a 1m length, 90 um thickness and 300 um height which form 3:1high-aspect-ratio, MEMS-based silicon GC column was fabricated. The GC column was coated with 95%Methyl 5% Phenyl Polysilozane (DB-5) as the stationary phase. Dimethyl methyl phosphonate (DMMP), Triethyl phosphate (TEP) and Methy salicylate were used for CWA simulations. All of these three samples can be separated less than 90s with reasonable column efficiency.
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