Abstract
Abstract— Novel anode layer plasma within minimum chamber space was developed for non‐contact alignment process. The plasma‐treated polyimide (PI) surface showed no particle contamination and no micro‐scratches. Surface morphology was investigated by using scanning electron microscope (SEM), an atomic force microscope (AFM), and X‐ray photoemission spectroscopy. The different oxygen‐to‐carbon ratio ([O]/[C] ratio) for XPS spectra indicated a composition change after plasma treatment. Surface pretilt angles were varied from 0 to 2.1° under different plasma exposure times. Finally, a prototype 20.8‐in. QXGA IPS‐mode gray‐scale medical liquid‐crystal display was successfully demonstrated with high contrast ratio, excellent uniformity, and wide viewing angle using this new plasma‐beam‐alignment technique.
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