Abstract
We previously reported on ultrashallow thermal donors (USTDs) in carbon-doped oxygen-containing monocrystalline silicon (Czochralski-grown, CZ-Si) crystals that were preannealed to introduce hydrogen at 1300 °C, and then annealed at 480 °C. In this study, the formation mechanism of the USTDs was evaluated. It was observed that an increase in the intensity of UTSDs leads to a reduction in that of hydrogen-related shallow thermal donors [STD(H)s], and the sum of the area intensities of the lines in the transmission spectra of USTDs and STD(H)s is nearly constant when the silicon crystals are annealed for longer than 10 h at 480 °C. We also found some thermally activated processes linked to the formation of USTDs. We thus conclude that the mechanism is composed of the high-speed formation of STD(H)s in the first stage and carbon modulation of the electronic structure of STD(H)s in the second stage.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
