Abstract
Micro/nanoparticles contamination is a major cause of laser-induced damage to optical components. This study performs theoretical and experimental research on laser dry cleaning for the removal of micro/nanoparticles from the surface of transparent optical elements. Laser modulation by the particles, the corresponding temperature and thermal stress distributions and phase transformation characteristics, particle cleaning forces, and the mechanism for overcoming adhesion were investigated under laser forward irradiation and back irradiation. The influence of the electromagnetic force on the particle cleaning effect was examined. The conditions for cleaning micro/nanoparticles and the range of the laser parameters were obtained.
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