Abstract
Nanocomposite coatings of TiN/Si3N4 have been prepared by ion beam assisted deposition (IBAD): simultaneous sputtering of Ti and Si targets and film bombardment by N2+ ions at 1000 eV. The Si/Ti ratio in the film varies from 0 to 0.9. The coatings are composed of amorphous Si3N4 and TiN nanocrystals with grain size of several nanometers. Such nanocomposites exhibit improved mechanical properties in comparison with TiN or Si3N4 deposited under the same conditions. The nanoindentation hardness of TiN/Si3N4 film at the Si/Ti ratio of 0.3 reaches a maximum of 42 GPa, compared with 22 GPa for TiN and 18 GPa for Si3N4. The wear resistance of AISI 52100 steel coated with these nanocomposite coatings is increased about three times.
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