Mechanical properties and oxidation resistance of coatings in the Ta-Zr-Si-B-C-N system obtained by magnetron sputtering of a TaZrSiB target in an Ar, N<sub>2</sub>, and C<sub>2</sub>H<sub>4</sub> atmosphere

Abstract

The method of magnetron sputtering in an argon, nitrogen, and ethylene atmosphere was used to obtain Ta-Zr-Si-B-C-N coatings. The coating structure was studied using scanning electron microscopy, energy dispersive and X-ray phase analysis. Mechanical properties of the coatings were determined using the nanoindentation method. Tribological tests were conducted using a Tribometer automated friction machine at a load of 1 N. Wear tracks were examined on an optical profilometer. The coating oxidation resistance was studied at a temperature of 1000 °C. It was found that coatings deposited in an argon atmosphere feature the highest hardness (30 GPa) and elastic recovery (79%). In addition, they can resist to oxidation up to 1000 °C inclusive due to a protective film consisting of silicon and tantalum oxides formed on their surfaces. Reactive coatings deposited in N 2 were inferior to non-reactive coatings in terms of oxidation resistance as they completely oxidized already at 1000 °C. However, they had a low coefficient of friction that was below 0.15.