Abstract
Coatings in the Mo—Si—B—(N) system are obtained using the magnetron sputtering method. Control of nitrogen and silicon content in the coatings is carried out using various gaseous Ar + N2 mixtures and variation of the number of Si segments in the area of MoSiB target erosion. The structure of coatings is studied using methods of scanning and transmission electron microscopy, X-ray analysis, infrared and optical emission spectroscopy, and Raman spectroscopy. Mechanical and tribological properties of the coatings are determined using methods of nanoindentation, scratch-testing, and tribological testing at temperatures of 25, 500, and 700°C. The oxidation resistance of coatings is studied. It is established that coatings with maximum Si and N content possess the best properties: hardness of 32 GPa, elastic recovery of 66%, low friction coefficient at high temperatures, and heat resistance up to 1200°C.
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