Abstract
The mesh experiment enables us to specify the X-ray point of interaction with a subpixel resolution. Miyata et al. [Jpn. J. Appl. Phys. 41 (2002) 5827] measured the charge cloud shape produced in a back-illuminated (BI) charge-coupled device (CCD). They found that there are two components of the charge cloud shape: a narrow component and a broad component. The size of the narrow component is 2.8–5.7 µm in units of standard deviation and strongly depends on the attenuation length of incident X-rays in Si, suggesting that it originates in the depletion region. On the other hand, the size of the broad component is roughly constant at ≃13 µm and does not depend on X-ray energies, suggesting that it originates in the field-free region. We applied the mesh experiment with the fully depleted BI CCD and found that there is a single component of the charge cloud with a size similar to that of the narrow component in Miyata et al.'s. We thus confirmed that the narrow and broad components originate in the depletion region and the field-free region, respectively.
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