Abstract
The spherical aberration coefficients, C s, of two objective lens pole pieces of a VG HB501A scanning transmission electron microscope (STEM) have been measured using power spectrum analysis of bright-field (BF) images of amorphous carbon films recorded at 100 keV. The high-resolution pole piece and the analytical pole piece have measured values of C s = 1.29 ± 0.23 mm, respectively. A small BF detector of 0.6 mrad allows coherent imaging, and a long dwell time attains a high signal-to-noise ratio. The imaging parameters have been measured with an accuracy comparable to that obtained in TEM.
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