Abstract
The mass separative performance of a turbomolecular pump is studied theoretically and experimentally. It is predicted theoretically that the separation factor of a single blade row varies considerably with the extracted gas flow from the low pressure side of a row and varies slightly with the composition of the gas. But the measured separation factor does not vary with the gas flow. This discrepancy between theory and experiment is explained by the fact that the extracting speed in the free molecule flow range is inversely proportional to the square root of molecular weight.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
