Abstract
In the free molecular flow range, the pumping performance of a turbomolecular pump has been predicted for various values of the dimensionless blade velocity ratioC by employing the integral method and the test particle Monte-Carlo (MC) method in the calculation of the transmission probability. Also, new approximate method combining the double row solutions, so called double-approximation (DA), is presented here. The calculated values of transmission probability for the single row agree quantitatively with the previous known numerical results. For a six-row pump, the MC method is employed to calculate the overall transmission probability for the entire set of blade rows. When the results of the approximate method combining the single row solutions are compared with those of the MC method atC=0.4, the previously known approximate method overestimates as much as 34% than does the MC method. But, the new DA method gives more accurate results within 10% of relative error with respect to the MC method.
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