Abstract
The performance of a turbomolecular pump (TMP) in both molecular and transition flow regions is predicted by the numerical solutions of the Boltzmann equation obtained by the direct simulation Monte Carlo method. The pumping characteristics of the TMP are investigated for a wide range of the Knudsen number. The maximum values of compression ratio and pumping speed strongly depend on the Knudsen number in transition region, while they depend weakly on the Knudsen number in free molecular flow region. The present numerical results show good agreement with the previously known experimental data. Finally, the results of the single blade row in both molecular and transition regions are used to predict the overall performance of a TMP, which has three kinds of blades with 24 rows.
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