Abstract
A surface acoustic wave (SAW) and a leaky shear horizontal SAW (SH-SAW) have been simultaneously excited along Al2O3[1 1 00] on an AlN(0001)/Al2O3(11 2 0) structure. Both modes are highly sensitive to surface mass loading. The measured mass sensitivities are in good agreement with theoretical prediction, and are comparable or higher than those reported on other SAW devices.
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