Abstract
The microstructures and magnetic properties of FePtC films grown on MgO/CrRu/glass substrates under different sputtering parameters were systematically investigated. Increased temperature induced chemical ordering and the increase of coercivity. The microstructures of FePtC film showed a two-layer structure with a granular layer above a continuous underlying layer. With increasing sputtering pressure (P??), the intensity of FePt (001) peak initially increased, and then decreased when PAr ? 20 mTorr. At 20 mTorr, Hc value increased to ~9.5 kOe, and only one magnetic layer was observed with increase of PAr ~ 50 mTorr. An increase of sputtering power at high pressures will further improve the magnetic isolation of FePt grains.
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