Abstract
Since the resonant gate transistor, technology for MEMS has been actively developed, initially based on a conventional semiconductor fabrication method and then, by their own technological evolution from innovative novel micromachining techniques [1]. Among various characteristic mechanisms in the microacutators, electrostatic, magnetic, thermal and piezoelectric actuations have been employed in microactuators. Electrostatic actuators have been most widely used and preferred for relatively small-scale displacement in the range of microns compared to the others. Thermal actuators generate large forces but with disadvantages of high power consumption and slow response time. Piezoelectric actuators show limited deflection ranges from small strains of piezoelectric films. On the other hand, magnetic actuators have drawn attentions due to their long-range force, large deflection and low power consumption. The subject of the microactuator is broad and involves various aspects of investigation. The focus of this chapter is on design, fabrication and application issues of magnetic microactuators.
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