Abstract
This paper presents the development of nanoactuators of free-standing Ti beam cantilevers with integrated superparamagnetic (SPM) beads at their front end that allow a controlled deflection by an external magnetic field gradient. A process flow is investigated based on three-step electron-beam lithography, reactive ion etching and the deposition of functionalized magnetic beads. While the thickness of the beams is 50nm, the lateral dimensions are designed to be 400nm, in order to carry beads of 360nm size. Magnetization measurements confirm the superparamagnetic behaviour of the beads having a saturation magnetization of 63kA/m. The position accuracy of multi-step electron beam lithography is about 10nm, allowing an exact deposition of functionalized beads.
Published Version
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