Low-Energy Electron Microscopy

Abstract

Low energy electron microscopy (LEEM) is a surface imaging technique in which the surface is illuminated by an approximately parallel electron beam at near normal incidence. The image is formed with those electrons which are elas- tically backscattered into a small angular region around the surface normal. The limitation to a small angular region is necessary because of the large aberrations of the objective lens which produces the primary image. This lens is a so-called cathode lens which not only has imaging properties but at the same time decelerates the fast electrons of the illuminating beam to the desired low energy at the specimen and re-accelerates the backscattered electrons to high energies again. In order to achieve this, the specimen is at a high negative potential which differs from the potential of the emitter of the electron gun of the illumination system by V 0 = E 0/e, where E 0 is the energy of the electrons at the specimen. Typical energy values are E = eV = 15−20 keV for the fast electrons and 0 < E 0 < 50 eV at the specimen. There are three fundamental quantities which are important in LEEM: resolution, intensity and contrast. These will be discussed in Sect. 12.1. Section 12.1 also describes how LEEM can be combined with other surface characterization techniques, such as low energy electron diffraction (LEED), photoemission electron microscopy (PEEM) and other emission microscopies. Section 12.2 illustrates the applications of LEEM and of the associated techniques to the study of clean surfaces, while Sect. 12.3 presents examples of the power of LEEM in the study of surface layers. Section 12.4 gives an outlook for possible future developments. A brief summary (Sect. 12.5) concludes this chapter.