Abstract
A low-aberration electrostatic einzel lens for a finely-focused ion-beam system has been developed. The system design goal was a total aberration of 0.1 µm under the following conditions: beam half-angle, 2.5 mrad; working distance, 43 mm; beam energy spread, 10 eV; accelerating energy, 30 keV. The total aberration was reduced by using the following two guidelines: First, the einzel lens operated in the accelerating mode provides low chromatic and spherical aberrations. Second, spherical aberration is further reduced by enlarging the electrode gap spacing and central electrode bore. The design method for the accelerating mode lens to determine the lens dimensions which provide a low electrode voltage for the total aberration required is described.
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