Abstract
Low-temperature plasma is generated by glow discharge with a high direct current power supply and argon gas. A brush-shaped plasma source with large volume is obtained with a width of 15 mm, a thickness of 1 mm, and a length of about 18 mm. The source design and mechanism of the plasma generation are presented and discussed. The large-volume plasma source provides advantages in surface treatment, such as high working efficiency, sufficient utilization of the plasma gas, and natural cooling down. The characteristics of large volume, high energy density, and low temperature allow this kind of plasma source to be more suitable to practical applications.
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