The Generation of Low Temperature Plasma and Industrial Application

Abstract

The low temperature plasma physics and technology had experienced a great change, which was from space plasma research in early 1960 turn to material treatment research in the 80s and 90s. Cause of high speed development of microelectronics science, environmental science, energy and material science, etc., there is a new opportunities and challenges for low temperature plasma science. Now the low temperature plasma physics and technology application is an important science and engineering with global influence, and it has a huge impact to the transformation of traditional industries and the development of high-tech economy. Studying low temperature plasma started is easy, but further hard. The article focuses on the generation of different low temperature plasma, including arc discharge, DBD discharge, corona discharge, plasma jet, glow discharge and uniform discharge, and wildly used in industrial applications such as Automotive, textile industry, print and packing, consumer electronics, biomedical, agricultural and environmental engineering.