Abstract
This research mainly focused on the design, analyze and simulate the diaphragm based MEMS pressure sensor using squared and slotted squared structure to measure the performance parameters. Four piezoresistor are placed in the weight stone bridge configuration. When pressure is applied to the diaphragm, stress is induced due to the resistance change of the piezoresistors. This piezoresistive pressure sensor with two different structures is designed to evaluate the stress and deformation. It is found that slotted squared structure obtain improved stress and deformation as compared to the squared structure by 2.2% and 1.8% vice versa. Silicon piezo-resistor is replaced with piezoresistors of CNT material and deformation is improved by 1.7%.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
